diff --git a/Cargo.lock b/Cargo.lock
index 3f0fdf03e..9312e7d7b 100644
--- a/Cargo.lock
+++ b/Cargo.lock
@@ -1602,6 +1602,7 @@ version = "0.0.0"
 dependencies = [
  "criterion2",
  "oxc_allocator",
+ "oxc_ast",
  "oxc_codegen",
  "oxc_isolated_declarations",
  "oxc_linter",
diff --git a/crates/oxc_parser/src/lexer/mod.rs b/crates/oxc_parser/src/lexer/mod.rs
index 4527e3a9f..02397fdd2 100644
--- a/crates/oxc_parser/src/lexer/mod.rs
+++ b/crates/oxc_parser/src/lexer/mod.rs
@@ -136,6 +136,13 @@ impl<'a> Lexer<'a> {
         Self::new(allocator, source_text, source_type, unique)
     }
 
+    /// Get errors.
+    /// Only used in benchmarks.
+    #[cfg(feature = "benchmarking")]
+    pub fn errors(&self) -> &[OxcDiagnostic] {
+        &self.errors
+    }
+
     /// Remaining string from `Source`
     pub fn remaining(&self) -> &'a str {
         self.source.remaining()
diff --git a/tasks/benchmark/Cargo.toml b/tasks/benchmark/Cargo.toml
index a3eceb789..d9e330f05 100644
--- a/tasks/benchmark/Cargo.toml
+++ b/tasks/benchmark/Cargo.toml
@@ -65,6 +65,7 @@ bench = false
 # with only the crates it needs, to speed up the builds
 [dependencies]
 oxc_allocator = { workspace = true, optional = true }
+oxc_ast = { workspace = true, optional = true }
 oxc_codegen = { workspace = true, optional = true }
 oxc_isolated_declarations = { workspace = true, optional = true }
 oxc_linter = { workspace = true, optional = true }
@@ -86,6 +87,7 @@ serde_json = { workspace = true, optional = true }
 [features]
 default = [
   "dep:oxc_allocator",
+  "dep:oxc_ast",
   "dep:oxc_codegen",
   "dep:oxc_isolated_declarations",
   "dep:oxc_linter",
@@ -103,7 +105,7 @@ codspeed_napi = ["criterion2/codspeed", "dep:serde", "dep:serde_json"]
 
 # Features for running each benchmark separately with minimum dependencies that benchmark needs.
 # e.g. `cargo build --release -p oxc_benchmark --bench parser --no-default-features --features parser`
-lexer = ["dep:oxc_allocator", "dep:oxc_parser", "dep:oxc_span", "dep:oxc_tasks_common"]
+lexer = ["dep:oxc_allocator", "dep:oxc_ast", "dep:oxc_parser", "dep:oxc_span", "dep:oxc_tasks_common"]
 parser = ["dep:oxc_allocator", "dep:oxc_parser", "dep:oxc_span", "dep:oxc_tasks_common"]
 transformer = [
   "dep:oxc_allocator",
diff --git a/tasks/benchmark/benches/lexer.rs b/tasks/benchmark/benches/lexer.rs
index 234da608b..0ef9dcb7c 100644
--- a/tasks/benchmark/benches/lexer.rs
+++ b/tasks/benchmark/benches/lexer.rs
@@ -1,7 +1,11 @@
 #![allow(clippy::disallowed_methods)]
 use oxc_allocator::Allocator;
+use oxc_ast::{ast::*, Visit};
 use oxc_benchmark::{criterion_group, criterion_main, BenchmarkId, Criterion};
-use oxc_parser::lexer::{Kind, Lexer};
+use oxc_parser::{
+    lexer::{Kind, Lexer},
+    Parser,
+};
 use oxc_span::SourceType;
 use oxc_tasks_common::{TestFile, TestFiles};
 
@@ -9,16 +13,25 @@ fn bench_lexer(criterion: &mut Criterion) {
     let mut group = criterion.benchmark_group("lexer");
 
     // Lexer lacks awareness of JS grammar, so it gets confused by a few things without the parser
-    // driving it, notably escapes in regexps and template strings.
-    // So simplify the input for it, by removing backslashes and converting template strings to
-    // normal string literals.
+    // driving it. So simplify the input for it, by replacing these syntaxes with plain strings.
+    // This ensures lexing completes without generating any errors, which is more realistic.
+    //
+    // It's unfortunate that this benchmark doesn't exercise the code paths for these syntaxes,
+    // but this is the closest we can get to a realistic benchmark of lexer in isolation.
+    let mut allocator = Allocator::default();
     let files = TestFiles::complicated()
         .files()
         .iter()
-        .map(|file| TestFile {
-            url: file.url.clone(),
-            file_name: file.file_name.clone(),
-            source_text: file.source_text.replace('\\', " ").replace('`', "'"),
+        .map(|file| {
+            let source_type = SourceType::from_path(&file.file_name).unwrap();
+
+            let mut cleaner = SourceCleaner::new(&file.source_text);
+            cleaner.clean(source_type, &allocator);
+            let source_text = cleaner.source_text;
+
+            allocator.reset();
+
+            TestFile { url: file.url.clone(), file_name: file.file_name.clone(), source_text }
         })
         .collect::<Vec<_>>();
 
@@ -43,3 +56,96 @@ fn bench_lexer(criterion: &mut Criterion) {
 
 criterion_group!(lexer, bench_lexer);
 criterion_main!(lexer);
+
+/// Cleaner of source text.
+///
+/// Purpose is to allow lexer to complete without any errors.
+/// Usually sources Oxc is asked to parse will not produce lexer errors, and generating diagnostics is
+/// fairly expensive, so is unrealistic for benchmarking purposes.
+///
+/// Certain syntax will parse without error, but the lexer alone does not have the context to understand
+/// they're fine. Notably this includes syntax where the lexer only consumes the first character and
+/// parser would then call back into lexer to complete the job.
+///
+/// So replace these syntaxes with strings so that lexer can complete without error:
+/// * `RegExpLiteral`
+/// * `TemplateLiteral`
+/// * `JSXText`
+struct SourceCleaner {
+    source_text: String,
+    replacements: Vec<Replacement>,
+}
+
+struct Replacement {
+    span: Span,
+    text: String,
+}
+
+impl SourceCleaner {
+    fn new(source_text: &str) -> Self {
+        Self { source_text: source_text.to_string(), replacements: vec![] }
+    }
+
+    fn clean(&mut self, source_type: SourceType, allocator: &Allocator) {
+        // Parse
+        let source_text = self.source_text.clone();
+        let parser_ret = Parser::new(allocator, &source_text, source_type).parse();
+        assert!(parser_ret.errors.is_empty());
+        let program = parser_ret.program;
+
+        // Visit AST and compile list of replacements
+        self.visit_program(&program);
+
+        // Make replacements
+        self.replacements.sort_unstable_by_key(|replacement| replacement.span);
+
+        for replacement in self.replacements.iter().rev() {
+            let span = replacement.span;
+            self.source_text
+                .replace_range(span.start as usize..span.end as usize, &replacement.text);
+        }
+
+        // Check lexer can lex it without any errors
+        let mut lexer = Lexer::new_for_benchmarks(allocator, &self.source_text, source_type);
+        while lexer.next_token().kind != Kind::Eof {}
+        assert!(lexer.errors().is_empty());
+    }
+
+    fn replace(&mut self, span: Span, text: String) {
+        self.replacements.push(Replacement { span, text });
+    }
+}
+
+impl<'a> Visit<'a> for SourceCleaner {
+    fn visit_reg_exp_literal(&mut self, regexp: &RegExpLiteral<'a>) {
+        let RegExpPattern::Raw(pattern) = regexp.regex.pattern else { unreachable!() };
+        let span = Span::sized(regexp.span.start, u32::try_from(pattern.len()).unwrap() + 2);
+        let text = convert_to_string(pattern);
+        self.replace(span, text);
+    }
+
+    fn visit_template_literal(&mut self, lit: &TemplateLiteral<'a>) {
+        let span = lit.span;
+        let text = span.shrink(1).source_text(&self.source_text);
+        let text = convert_to_string(text).replace('\n', " ");
+        self.replace(span, text);
+    }
+
+    fn visit_jsx_text(&mut self, jsx_text: &JSXText<'a>) {
+        let span = jsx_text.span;
+        let text = span.source_text(&self.source_text);
+        let text = convert_to_string(text).replace('\n', " ");
+        self.replace(span, text);
+    }
+}
+
+#[expect(clippy::naive_bytecount)]
+fn convert_to_string(text: &str) -> String {
+    let single_quote_count = text.as_bytes().iter().filter(|&&b| b == b'\'').count();
+    let double_quote_count = text.as_bytes().iter().filter(|&&b| b == b'"').count();
+
+    let (quote, other_quote) =
+        if single_quote_count <= double_quote_count { ('\'', "\"") } else { ('"', "'") };
+    let text = text.replace(quote, other_quote);
+    format!("{quote}{text}{quote}")
+}